RF MEMS DMTL phase shifter on low-resistivity silicon for Ku band with reduced substrate loss

IEEE Region 10 Annual International Conference, Proceedings/TENCON

Volumn , Issue , 2010, Pages 957-962

  Kundu, Avra ^a   Gupta, Bhaskar ^a   Sarkar, Binay K ^b   Saha, Hiranmay ^c   Lahiri, Samir K ^b  

^a JADAVPUR UNIVERSITY   (India)

^b INDIAN INSTITUTE OF TECHNOLOGY   (India)

^c INDIAN INSTITUTE OF ENGINEERING SCIENCE AND TECHNOLOGY   (India)

Author keywords

Equivalent model; Low loss; Phase shifter; Reduced parasitic; RF MEMS switch; Two movable plates

Indexed keywords

EQUIVALENT MODEL; LOW-LOSS; REDUCED PARASITIC; RF-MEMS SWITCHES; TWO MOVABLE PLATES;

BANDPASS FILTERS; ELECTRIC SWITCHES; PHASE SHIFTERS; SILICON OXIDES;

PHASE SHIFT;

EID: 79951629029     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TENCON.2010.5686538     Document Type: Conference Paper

References (12)

1. D. Lederer, and J-P. Raskin, "Substrate loss mechanisms for microstrip and CPW transmission lines on lossy silicon wafers, " Solid-state Electronics, vol. 47, pp. 1927-1936, 2003.
2. K. Grenier, V. lubecke, F. Bouchriha, L. Rabbia, D. Dubuc, P. Pons, and R. Plana, "Polymer in RF and millimeter wave applications", proc. SPIE 5116, pp.502-513, 2003.
3. J. Wang, T. Ativanichayaphong, W-D. Huang, Y. Cai, A. Davis, M. Chiao, and J.C. Chiao, "A distributed MEMS phase shifter on a low-resistivity silicon substrate", Sens. Actuators, A, vol. 144, pp. 207-212, 2008.
4. K. Topalli, O. A. Civi, S. Demir, S. Koc, and T. Akin, "A monolithic phased array using 3-bit distributed RF MEMS phase shifters", IEEE Trans. Microwave Theory Tech., vol. 56, no. 2, pp. 270-277, February 2008. (Pubitemid 351207467)
5. M. F. Bolanos, J. P. carrier, P. Dainesi, and A. M. Ionescu, "RF MEMS capacitive switch on semi suspended CPW using low- loss high-resistivity silicon substrate", Microelectronic Engg., vol. 85, pp. 10391042, 2008.
6. M. Bakri-Kassem, R. R. Mansour, Two movable- plate nitride loaded MEMS variable capacitor, IEEE Trans. Microwave Theory Tech. 52 (2004) 831-837.
7. A. Kundu, N.C. Mondal, B.Gupta, S.K.Lahiri, H.Saha, Performance Improvement of RF MEMS Switch with Two Movable Plates, Proc. International Conference on MEMS (ICMEMS), ISBN-978-81908468-0-6 (2009).
8. A. Kundu, N.C. Mondal, B.Gupta, S.K.Lahiri, H.Saha, Performance Improvement of RF MEMS Switch with Two Movable Plates, International Journal of Advances in Engineering Sciences and Applied Mathematics. (Communicated; with editor).
9. J. Babaei, R. Ramer, T. Hesketh, A novel 3D low voltage electrostatic RF MEMS switch with two movable electrodes, Proc. of SPIE 6800 68000D (2008).
10. A Kundu, S Sethi, N C Mondal, B Gupta, S K Lahiri, H Saha, Analysis and optimization of two movable plates RF MEMS switch for simultaneous improvement in actuation voltage and switching time, Micrelectronics J., vol 41, pp. 257-265, 2010, ISSN:0026-2692.
11. G. M. Rebeiz, RF MEMS, theory, design and technology, John Wiley and Sons, 2003.
12. Nihad I. Dib, Linda P. B. Katehi, Impedance calculation for the microshield line, IEEE Microwave and Guided Letters, vol 2, no. 10, pp. 406-408, 1992.