Polymers in RF and millimeterwave applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 II, Issue , 2003, Pages 502-513

  Grenier, K ^a   Lubecke, V ^b   Bouchriha, F ^a   Rabbia, L ^a   Dubuc, D ^a   Pons, P ^a   Plana, R ^a  

^a LAAS CNRS   (France)

^b UNIVERSITY OF HAWAII   (United States)

Author keywords

Coplanar; Inducto r; Losses; Micromachining; Microwave; Millimeterwave; Polymer; Quality factor; Silicon

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC INDUCTORS; INTEGRATED CIRCUIT MANUFACTURE; INTERFACES (MATERIALS); MICROMACHINING; MILLIMETER WAVE DEVICES; OPTIMIZATION; PASSIVE NETWORKS; SEMICONDUCTING SILICON; SUBSTRATES; THICK FILMS; WAVEGUIDES;

DIELECTRIC MEMBRANE; QUALITY FACTOR; SILICON MICROMACHINED SUBSTRATES;

SEMICONDUCTING POLYMERS;

EID: 0041828504     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.499052     Document Type: Conference Paper

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