Experimental analysis of the surface roughness evolution of etched glass for micro/nanofluidic devices

Journal of Micromechanics and Microengineering

Volumn 21, Issue 2, 2011, Pages

  Ren, J ^a   Ganapathysubramanian, B ^a   Sundararajan, S ^a  

^a Iowa State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOCORRELATION LENGTH; CHANNEL SURFACE; ETCHING TIME; EXPERIMENTAL ANALYSIS; EXPERIMENTAL DATA; FLUID FLOW; GLASS SURFACES; GOODNESS OF FIT; HYPOTHESIS TESTS; KOLMOGOROV-SMIRNOV; LAB-ON-CHIP DEVICES; LOCATION-SCALE DISTRIBUTIONS; MICRO-FLUIDIC DEVICES; MICROFLUIDIC FLOW; NON-NEWTONIAN FLUIDS; PROCESSING CONDITION; RANDOM ROUGHNESS; ROUGHNESS EVOLUTION; STATISTICAL DISTRIBUTION;

FLUID DYNAMICS; FLUIDIC DEVICES; FLUIDS; GLASS; METAL ANALYSIS; MICROFLUIDICS; NON NEWTONIAN FLOW; NON NEWTONIAN LIQUIDS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

WET ETCHING;

EID: 79551696343     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/2/025012     Document Type: Article

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