Effects of hydrogen doping on the electrical properties of Zinc-Tin-Oxide thin films

Japanese Journal of Applied Physics

Volumn 49, Issue 12, 2010, Pages

  Kim, Hye Ri ^a,b   Kim, Dong Ho ^a   Byon, Eungsun ^a   Lee, Goo Hyun ^a   Lee, Gun Hwan ^a   Song, Pung Keun ^b  

^a Korea Institute of Material Science   (South Korea)

^b Pusan National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING IN VACUUM; CATIONIC COMPOSITION; CHARACTERISTIC PROPERTIES; CO-SPUTTERING METHOD; ELECTRICAL PROPERTY; GLASS SUBSTRATES; HYDROGEN ADDITION; HYDROGEN ATOMS; HYDROGEN DOPING; LOCAL STATE; OPTICAL TRANSMITTANCE; OXIDE THIN FILMS; PROCESS CONDITION; REDUCING ATMOSPHERE; SHALLOW DONORS; SPUTTERING GAS; TRANSPARENT CONDUCTING OXIDE FILMS; ZNO AND SNO;

CARRIER CONCENTRATION; CARRIER MOBILITY; CONDUCTIVE FILMS; ELECTRIC PROPERTIES; HYDROGEN; OXYGEN; OXYGEN VACANCIES; SUBSTRATES; TIN; ZINC; ZINC OXIDE;

OXIDE FILMS;

EID: 79551648964     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.49.121101     Document Type: Article

References (17)

1. T. Minami and T. Miyata: Thin Solid Films 517 (2008) 1474.
2. X. Wu, W. P. Mulligan, and T. J. Coutts: Thin Solid Films 286 (1996) 274.
3. H. Enoki, T. Nakayama, and J. Echigoya: Phys. Status Solidi A 129 (1992) 181.
4. D. L. Young, H. Moutinho, Y. Yan, and T. J. Coutts: J. Appl. Phys. 92 (2002) 310.
5. K. Satoh, Y. Kakehi, A. Okamoto, S. Murakami, F. Uratani, and T. Yotsuya: Jpn. J. Appl. Phys. 44 (2005) L34.
6. T. Minami, S. Takata, H. Sato, and H. Sonohara: J. Vac. Sci. Technol. A 13 (1995) 1095.
7. T. Minami, H. Sonohara, S. Takata, and H. Sato: Jpn. J. Appl. Phys. 33 (1994) L1693.
8. C. G. Van De Walle: Phys. Rev. Lett. 85 (2000) 1012.
9. L.-Y. Chen, W.-H. Chen, J.-J. Wang, F. C.-N. Hong, and Y.-K. Su: Appl. Phys. Lett. 85 (2004) 5628.
10. A. K. Singh, A. Janotti, M. Scheffler, and C. G. Van de Walle: Phys. Rev. Lett. 101 (2008) 055502.
11. Y. Hayashi, K. Kondo, K. Murai, T. Moriga, I. Nakabayashi, H. Fukumoto, and K. Tominaga: Vacuum 74 (2004) 607.
12. D. Kovacheva and K. Petrov: Solid State Ionics 109 (1998) 327.
13. J. Bang and K. J. Chang: Appl. Phys. Lett. 92 (2008) 132109.
14. S. J. Tark, M. G. Kang, S. Park, J. H. Jang, J. C. Lee, W. M. Kim, J. S. Lee, and D. Kim: Curr. Appl. Phys. 9 (2009) 1318.
15. Y. R. Park, J. Kim, and Y. S. Kim: Appl. Surf. Sci. 255 (2009) 9010.
16. Ç . Kiliç and A. Zunger: Phys. Rev. Lett. 88 (2002) 095501.
17. J. Lee: Thin Solid Films 516 (2008) 1386.