Enhancing mass transport for synthesizing single-walled carbon nanotubes via micro chemical vapor deposition

Journal of Microelectromechanical Systems

Volumn 20, Issue 1, 2011, Pages 9-11

  Zhou, Qin ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Carbon nanotube; chemical vapor deposition (CVD); microelectromechanical system

Indexed keywords

CHEMICAL VAPOR; CHEMICAL VAPOR DEPOSITION PROCESS; EXPERIMENTAL PARAMETERS; GROWTH CONDITIONS; MASS TRANSPORT; MICROELECTROMECHANICAL SYSTEM; NOVEL METHODOLOGY; REACTION CHAMBERS; SMALL-DIAMETER; SOURCE GAS;

AMORPHOUS CARBON; CARBON NANOTUBES; CATALYST POISONING; COMPOSITE MICROMECHANICS; ETHYLENE; LAMINAR FLOW; MASS TRANSFER; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MINIATURE INSTRUMENTS; SINGLE-WALLED CARBON NANOTUBES (SWCN); SYNTHESIS (CHEMICAL);

CHEMICAL VAPOR DEPOSITION;

EID: 79551611118     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2100035     Document Type: Article

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