Micro chemical vapor deposition system: Design and verification

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 72-75

  Zhou, Q ^a   Lin, L ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR; EXPERIMENTAL PARAMETERS; GAS SPECIES; HEAT CAPACITIES; HIGH QUALITY; MICRO-SCALE; SMALL DIFFUSION; TEMPERATURE STABILIZATION;

CHEMICAL VAPOR DEPOSITION; LAMINAR FLOW; LARGE SCALE SYSTEMS; REYNOLDS NUMBER; SINGLE-WALLED CARBON NANOTUBES (SWCN); SURFACE DIFFUSION; SURFACE REACTIONS; SYNTHESIS (CHEMICAL); SYSTEMS ENGINEERING; VAPORS;

CARBON NANOTUBES;

EID: 65949090974     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805322     Document Type: Conference Paper

References (10)

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