High-temperature bulk acoustic wave sensors

Measurement Science and Technology

Volumn 22, Issue 1, 2011, Pages

  Fritze, Holger ^a  

^a CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

High temperature properties; High temperature sensors; Impedance; Langasite resonators; Network analysis; Resonance spectra; Resonant sensors

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC RESONATORS; ACOUSTIC WAVES; DEPOSITION; ELECTRIC IMPEDANCE; ELECTRIC NETWORK ANALYSIS; EQUIVALENT CIRCUITS; GALLIUM; HIGH TEMPERATURE PROPERTIES; MOBILE TELECOMMUNICATION SYSTEMS; OXYGEN VACANCIES; PIEZOELECTRICITY; RESONATORS; THIN FILMS;

BUTTERWORTH-VAN DYKE EQUIVALENT CIRCUITS; EQUIVALENT ELECTRICAL CIRCUITS; HIGH TEMPERATURE SENSORS; LANGASITE RESONATORS; MECHANICAL AND ELECTRICAL PROPERTIES; PIEZOELECTRIC AND DIELECTRIC CONSTANTS; RESONANCE SPECTRUM; RESONANT SENSORS;

ELECTROMECHANICAL DEVICES;

EID: 79251537763     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/1/012002     Document Type: Review

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