Molecular depth profiling of polystyrene by electrospray droplet impact

Surface and Interface Analysis

Volumn 43, Issue 1-2, 2011, Pages 167-170

  Sakai, Yuji ^a,c   Iijima, Yoshitoki ^b   Mukou, Souichirou ^a   Hiraoka, Kenzo ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

^b JEOL LTD   (Japan)

^c JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

damage free etching; electrospray droplet impact; molecular depth profiling; polystyrene

Indexed keywords

DAMAGE ACCUMULATION; DAMAGE-FREE ETCHING; ELECTROSPRAY DROPLETS; ETCHED SURFACE; MOLECULAR DEPTH PROFILING; POLYMER MATERIALS; SURFACE ETCHING; WATER DROPLETS;

DROP FORMATION; ETCHING; POLYSTYRENES; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACES;

DEPTH PROFILING;

EID: 78951472307     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3490     Document Type: Conference Paper

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