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Volumn 40, Issue 5, 2011, Pages 1175-1182

Novel single-source precursors for the fabrication of PbTiO3, PbZrO3 and Pb(Zr1-xTix)O3 thin-films by chemical vapor deposition

(5) Veith, Michael a,b Bender, Michael a Lehnert, Tobias a Zimmer, Michael b Jakob, Anette c

a INM LEIBNIZ INSTITUTE FOR NEW MATERIALS (Germany)

b SAARLAND UNIVERSITY (Germany)

c FRAUNHOFER INSTITUTE FOR BIOMEDICAL ENGINEERING (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALKOXIDES; AZEOTROPIC MIXTURE; COERCIVE FIELD; LEAD TITANATES; LEAD ZIRCONATE; LEAD-ZIRCONATE-TITANATE FILMS; PZT; PZT FILM; REMNANT POLARIZATIONS; SINGLE-SOURCE PRECURSOR; THERMAL CVD; THERMAL TREATMENT;

CHEMICAL VAPOR DEPOSITION; ZIRCONIUM;

SEMICONDUCTING LEAD COMPOUNDS;

LEAD;

ARTICLE; CHEMISTRY; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY;

LEAD; MAGNETIC RESONANCE SPECTROSCOPY;

EID: 78751548727 PISSN: 14779226 EISSN: 14779234 Source Type: Journal
DOI: 10.1039/c0dt00830c Document Type: Article

Times cited : (11)

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