Liquid delivery MOCVD of niobium-doped Pb(Zr,Ti)O3 using a novel niobium precursor

Chemistry of Materials

Volumn 11, Issue 2, 1999, Pages 209-212

  Chen, I S ^a   Roeder, J F ^a   Glassman, T E ^a   Baum, T H ^a  

^a Adv Delivery Chem Systems Ltd   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000091079     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm980503s     Document Type: Article

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24. The use of this compound for liquid delivery MOCVD: Roeder, J. F.; Chen, I.-S.; Bilodeau, S.; Baum, T. H. U.S. patent pending.