Fabrication of polymer splitter by micro hot embossing technique

Tamkang Journal of Science and Engineering

Volumn 7, Issue 1, 2004, Pages 5-9

  Chen, Chin Lung ^a   Jen, Fuhua ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b MINGHSIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

MEMS; Micro Hot Embossing; Polymer Splitter; Taiguchi

Indexed keywords

COMPUTER SIMULATION; LIGHT PROPAGATION; MICROELECTROMECHANICAL DEVICES; OPTICAL COMMUNICATION; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; SILICON; SILICON WAFERS;

MICRO HOT EMBOSSING; POLYMER SPLITTERS; TAIGUCHI;

POLYMERS;

EID: 2942598800     PISSN: 15606686     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. Marc Madou, "Fundamentals of Microfabrication," CRC Press, U.S.A., pp. 275-323 (1997).
2. Institut für Mikrotechnik Mainz GmbH. Homepage, http://www.imm- mainz.de/, (2002).
3. "BeamPROP™ Version 5.0 Manual," Rsoft, Inc. and Columbia University, NY, U.S.A., (2002).
4. "HEX-03 Hot Embossing System Operation Manual," Jenoptik Mikrotechnik Inc., (2002).
5. "Good Fellow Catalogue," pp. 531-533 (2002).