Reliability-based optimisation of chemical vapour deposition process

International Journal of Reliability and Safety

Volumn 3, Issue 4, 2009, Pages 363-383

  George, Pradeep ^a   Lin, Po Ting ^a   Gea, Hae Chang ^a   Jaluria, Yogesh ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

Chemical vapour deposition; Compromise response surface method; CRSM; CVD; Performance measure approach; PMA; RBDO; Reliability based design optimisation; Silane; Silicon; Vertical impinging reactor

Indexed keywords

DEPOSITION RATES; RELIABILITY; SILANES; SILICON; SURFACE PROPERTIES; THIN FILMS;

CHEMICAL VAPOUR DEPOSITION; CRSM; PERFORMANCE MEASURE APPROACH (PMA); RBDO; RELIABILITY-BASED DESIGN OPTIMISATION; RESPONSE SURFACE METHOD; VERTICAL IMPINGING REACTOR;

CHEMICAL VAPOR DEPOSITION;

EID: 78651545430     PISSN: 1479389X     EISSN: 14793903     Source Type: Journal    
DOI: 10.1504/IJRS.2009.028582     Document Type: Article

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