Effect of buoyancy, susceptor motion, and conjugate transport in chemical vapor deposition systems

Journal of Heat Transfer

Volumn 121, Issue 3, 1999, Pages 757-761

  Chiu, W K S ^a   Jaluria, Y ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

Conjugate; Heat transfer; Manufacturing; Materials; Mixed convection; Thin films

Indexed keywords

BUOYANCY; CHEMICAL VAPOR DEPOSITION; FLOW OF FLUIDS; HELIUM;

CONJUGATE TRANSPORT; SUSCEPTOR MOTION;

HEAT TRANSFER;

BUOYANCY; FLUID FLOW; HEAT TRANSFER; VAPOR DEPOSITION;

EID: 0033432857     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2826049     Document Type: Article

References (10)

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