Experimental setup for energy-filtered scanning confocal electron microscopy (EFSCEM) in a double aberration-corrected transmission electron microscope

Journal of Physics: Conference Series

Volumn 241, Issue , 2010, Pages

  Wang, P ^a   Behan, G ^a   Kirkland, A I ^a   Nellist, P D ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ELECTRON MICROSCOPY; SCANNING; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

ABERRATION CORRECTORS; ABERRATION-CORRECTED; CHROMATIC ABERRATION; INELASTICALLY SCATTERED; OPTICAL CONFIGURATIONS; OPTICAL SECTIONING; SPHERICAL ABERRATIONS; TRANSMISSION GEOMETRIES;

ELECTRONS;

EID: 78651092374     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/241/1/012012     Document Type: Conference Paper

References (12)

1. Nellist P D et al 2004 Science 305 1741
2. van Benthem K et al 2005 Appl. Phys. Lett. 87 034104
3. Gu M 1996 Principles of Three Dimensional Imaging in Confocal Microscopes (World Scientific)
4. Frigo S P, Levine Z H and Zaluzec N J 2002 Appl. Phys. Lett. 81 2112
5. D'Alfonso A J, Cosgriff E C, Findlay S D, Behan G, Kirkland A I, Nellist P D and Allen L J 2008 Ultramicroscopy 108 1567
6. Nellist P D, Behan G, Kirkland A I and Hetherington C J D 2006 Appl. Phys. Lett. 89 124105
7. Haider M, Muller H, Uhlemann S, Zach J, Loebau U and Hoeschen R 2008 Ultramicroscopy 108 167
8. Rose H 2005 Ultramicroscopy 103 1
9. Haider M, Uhlemann S, Schwan E, Rose H, Kabius B and Urban K 1998 Nature 392 768
10. Hutchison J L, Titchmarsh J M, Cockayne D J H, Doole R C, Hetherington C J D, Kirkland A I and Sawada H 2005 Ultramicroscopy 103 7
11. Chang L Y, Kirkland A I and Titchmarsh J M 2006 Ultramicroscopy 106 301
12. Haider M, Braunshausen G and Schwan E 1995 Optik (Jena) 99 167