Influence of chemical structure and beam degradation on the kinetic energy of molecular secondary ions in keV ion sputtering of polymers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 135, Issue 1-4, 1998, Pages 430-435

  Delcorte, A ^a   Bertrand, P ^a  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

Ion beam degradation; Ion emission; Kinetic energy distributions; Metastable ions; Polymer; Secondary ion mass spectrometry

Indexed keywords

AROMATIC POLYMERS; DEGRADATION; ION BEAMS; ION BOMBARDMENT; MOLECULAR STRUCTURE; POLYBUTENES; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; SURFACE TREATMENT; THIN FILMS;

ION BEAM DEGRADATION; ION EMISSION; KINETIC ENERGY DISTRIBUTIONS;

PLASTIC FILMS;

EID: 0032472651     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00652-6     Document Type: Article

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