Structural, mechanical and erosion properties of yttrium oxide coatings by axial suspension plasma spraying for electronics applications

Journal of Thermal Spray Technology

Volumn 20, Issue 1-2, 2011, Pages 170-185

  Kitamura, Junya ^a   Tang, Zhaolin ^b   Mizuno, Hiroaki ^a   Sato, Kazuto ^a   Burgess, Alan ^b  

^a FUJIMI INCORPORATED RandD Center   (Japan)

^b Northwest Mettech Corp   (Canada)

Author keywords

nanostructured coatings; plasma erosion; PS microstructures; suspension plasma spray; yttrium oxide

Indexed keywords

COATING FORMATION; CONVENTIONAL COATINGS; CUBIC PHASE; DENSE COATING; ELECTRONIC DEVICE; ELECTRONICS APPLICATIONS; EROSION PROPERTIES; EROSION RESISTANCE; FINE POWDERS; HIGH HARDNESS; LAMELLAR BOUNDARIES; LOW POROSITY; MICROSTRUCTURAL ANALYSIS; MONOCLINIC PHASE; NANOSTRUCTURED COATINGS; OXIDE COATING; PLASMA EROSION; PLASMA SPRAY COATING; PS MICROSTRUCTURES; SLURRY COATING; SUSPENSION COATINGS; SUSPENSION PLASMA SPRAYING; SUSPENSION PLASMA SPRAYS;

CLARIFICATION; CRYSTAL STRUCTURE; EROSION; MECHANICAL PROPERTIES; MICROSTRUCTURE; PLASMA ETCHING; PLASMA JETS; PLASMA SPRAYING; PLASMAS; POWDERS; PROTECTIVE COATINGS; SLURRIES; YTTRIUM; YTTRIUM ALLOYS; YTTRIUM OXIDE;

SPRAYED COATINGS;

EID: 78650708688     PISSN: 10599630     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11666-010-9585-x     Document Type: Conference Paper

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