Plasma-erosion properties of ceramic coating prepared by plasma spraying

Materials Transactions

Volumn 47, Issue 7, 2006, Pages 1677-1683

  Kitamura, Junya ^a   Mizuno, Hiroaki ^a   Kato, Nobuaki ^a   Aoki, Isao ^a  

^a FUJIMI INCORPORATED RandD Center   (Japan)

Author keywords

Alumina; Ceramic coating; Erosion; Plasma spray; Semiconductor equipment; Yttria

Indexed keywords

ALUMINA; LIQUID CRYSTAL DISPLAYS; MICROSTRUCTURE; PLASMA SPRAYING; REACTIVE ION ETCHING; SEMICONDUCTOR DEVICES; YTTRIUM;

PLASMA SPRAYED CERAMIC COATINGS; PLASMA-EROSION PROPERTIES; YTTRIA COATINGS;

CERAMIC COATINGS;

EID: 33748561845     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.47.1677     Document Type: Conference Paper

References (6)

1. Y. Kobayashi: The Proc. 37th Seminar on High-Temperature Ceramics, (The Ceramics Society of Japan, 2005) p. 1-7 (in Japanese).
2. R. Ohtsuki: Publication of Japanese patent application, 2001-226773.
3. Status and perspective of thermal spray markets 2004, Digital Research Institute Inc. (Nagoya, Japan), 2004, p. 20-33 (in Japanese).
4. R. V. Gansert: The Proc. International Thermal Spray Conference 2003, (ASM International, 2003) p. 159-161.
5. T. Tsukatani and Y. Takai: Publication of Japanese patent applications, 2002-80954 (2002).
6. J. Kitamura, I. Aoki and Y. Sugiyama: Application for Japanese patents (2005).