Structural, mechanical and erosion properties of plasma sprayed yttrium oxide coatings by axial injection of fine powder slurries for semiconductor and flat-panel-display applications

Proceedings of the International Thermal Spray Conference

Volumn , Issue , 2009, Pages 567-572

  Kitamura, J ^a   Ibe, H ^a   Yuasa, F ^a   Tang, Z ^b   Burgess, A ^b  

^a FUJIMI INCORPORATED RandD Center   (Japan)

^b Northwest Mettech Corp   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BASIC COATING; DISPLAY APPLICATION; EROSION PROPERTIES; EROSION RESISTANCE; ETCHING PROCESS; FINE POWDERS; HIGH DENSITY; HIGH HARDNESS; HIGH UNIFORMITY; HIGH-POWER; PLASMA EROSION; PLASMA SPRAY COATING; PLASMA SPRAYED; SILICON ELECTRONICS; SMOOTH SURFACE;

CRYSTAL MICROSTRUCTURE; HARDNESS; MECHANICAL PROPERTIES; PLASMA DISPLAY DEVICES; PLASMA ETCHING; PLASMA JETS; PLASMAS; POWDER COATINGS; PROTECTIVE COATINGS; SPRAYED COATINGS; YTTRIUM; YTTRIUM ALLOYS; YTTRIUM OXIDE;

PLASMA SPRAYING;

EID: 76749108590     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1361/cp2009itsc0567     Document Type: Conference Paper

References (10)

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