Sub-50nm DG-TFT-SONOS-the ideal flash memory for monolithic 3-D integration

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2008, Pages

  Walker, Andrew J ^a  

^a Schiltron Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3-D INTEGRATIONS; SILICON-BASED; SUB-50 NM;

ELECTRON DEVICES;

FLASH MEMORY;

EID: 78650423353     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2008.4796830     Document Type: Conference Paper

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