A highly stackable Thin-Film Transistor (TFT) NAND-type flash memory

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 2006, Pages 46-47

  Lai, Erh Kun ^a,b   Lue, Hang Ting ^a   Hsiao, Yi Hsuan ^a   Hsieh, Jung Yu ^a   Lee, Shih Chin ^a   Lu, Chi Pin ^a   Wang, Szu Yu ^a,b   Yang, Ling Wu ^a   Chen, Kuang Chao ^a   Gong, Jeng ^b   Hsieh, Kuang Yeu ^a   Ku, Joseph ^a   Liu, Rich ^a   Lu, Chih Yuan ^a  

^a MACRONIX INTERNATIONAL CO LTD   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY GAP; FLASH MEMORY; NAND CIRCUITS; POLYSILICON;

NAND ARRAY FUNCTIONS; THERMAL BUDGET PROCESS;

THIN FILM TRANSISTORS;

EID: 39749163525     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/VLSIT.2006.1705209     Document Type: Conference Paper

References (4)

1. H. T. Lue, et.al, IEDM 2005, session 22-3, pp. 555-558.
2. M, Crowley, et.al, ISSCC 2003, pp.284-285.
3. J. A. Walkers, et.al, VISI 2003, pp. 29-30.
4. L. T. Su, et.al, IEDM 1992, session 13-4.