Comparison of optical surface roughness measured by stylus profiler, AFM, and white light interferometer using power spectral density

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7656, Issue PART 1, 2010, Pages

  Chen, Jianchao ^a   Sun, Tao ^a   Wang, Jinghe ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

AFM; power spectral density (PSD); stylus; surface roughness; white light interferometer

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; MEASUREMENT DATA; MEASUREMENT INSTRUMENTS; NOVEL METHODS; OVERLAPPING REGIONS; POWER SPECTRAL DENSITY (PSD); POWER SPECTRAL DENSITY FUNCTION; REMAINING DIFFERENCES; RMS ROUGHNESS; SPATIAL FREQUENCY; STYLUS; SURFACE FEATURE; WHITE-LIGHT INTERFEROMETER; ZERODUR;

FUSED SILICA; INSTRUMENTS; INTERFEROMETERS; MANUFACTURE; MEASUREMENT THEORY; METAL ANALYSIS; OPTICAL TESTING; POWER SPECTRAL DENSITY; ROUGHNESS MEASUREMENT; SCANNING; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SILICON WAFERS; SURFACE PROPERTIES; TECHNOLOGY;

SURFACE ROUGHNESS;

EID: 78650000546     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.863268     Document Type: Conference Paper

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