Fabrication and experimental investigation of diffraction characteristics for a pitch-tunable grating based on SOG process

Guangxue Xuebao/Acta Optica Sinica

Volumn 30, Issue 11, 2010, Pages 3128-3132

  Yan, Bin ^a   Yuan, Weizheng ^a   Yu, Yiting ^a   Qiao, Dayong ^a   Sun, Ruikang ^a   Li, Taiping ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

Diffraction characteristics; Micro programmable grating; Micro opto electro mechanical system (MOEMS); Pitch tunable grating; Silicon on glass (SOG)

Indexed keywords

DIFFRACTION CHARACTERISTICS; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICROPROGRAMMABLE GRATINGS; SILICON-ON-GLASS (SOG); TUNABLE GRATING;

DIFFRACTION; ELECTRIC DRIVES; FLIGHT DYNAMICS; GLASS; MECHANICAL ENGINEERING; MECHANICS; MONOCHROMATORS; OPTICAL COMMUNICATION; OPTICAL INSTRUMENTS; OPTICAL SWITCHES;

MOEMS;

EID: 78649948985     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: 10.3788/AOS20103011.3128     Document Type: Article

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