Review of MEMS-based programmable gratings: Part II

Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument

Volumn 29, Issue 6, 2008, Pages 1339-1344

  Yu, Yiting ^a   Yuan, Weizheng ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

Diffraction gratings; MEMS; Micro programmable gratings; MOEMS

Indexed keywords

EID: 47049130971     PISSN: 02543087     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (24)