Structural and mechanical investigations of magnetron sputtering TiO 2/Ti/TiN multilayer films on Si(100) substrate

Journal of Coatings Technology and Research

Volumn 7, Issue 6, 2010, Pages 821-829

  Carradò, Adele ^a   Schmerber, Guy ^a   Pelletier, Hervè ^b,c  

^a INSTITUT DE PHYSIQUE ET CHIMIE DES MATÉRIAUX DE STRASBOURG   (France)

^b INSTITUT CHARLES SADRON   (France)

^c INSA DE STRASBOURG   (France)

Author keywords

AFM; Magnetron sputtering; Model substrate; Multilayer; Nanoindentation; SEM

Indexed keywords

ATOMIC FORCE MICROSCOPY; BIOCOMPATIBILITY; CRYSTAL ATOMIC STRUCTURE; FILM PREPARATION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; MEDICAL APPLICATIONS; MIXTURES; MULTILAYERS; NANOINDENTATION; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TITANIUM; TITANIUM DIOXIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

BIOMEDICAL APPLICATIONS; DC REACTIVE MAGNETRON SPUTTERING; HARDNESS AND ELASTIC MODULUS; MICROSCOPIC CHARACTERIZATION; MODEL SUBSTRATES; MULTILAYER SUBSTRATE; SCANNING ELECTRONS; SI (100) SUBSTRATE;

MULTILAYER FILMS;

EID: 78649837454     PISSN: 15470091     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11998-010-9287-9     Document Type: Article

References (30)

1. Breme, HJ, Helsen, JA, "Selection of Materials." In: Helsen, JA, Breme, HJ (eds.) Metals as Biomaterials. Wiley, Chichester, UK, 1998
2. JM Lackner 2005 Industrially-Styled Room-Temperature Pulsed Laser Deposition of Titanium-Based Coatings Vacuum 78 73 82 1:CAS:528: DC%2BD2MXit1agur8%3D 10.1016/j.vacuum.2004.12.017 (Pubitemid 40319860)
3. D Rafaja V Valvoda R Kužel AJ Perry JR Treglio 1996 XRD Characterization of Ion-Implanted TiN Coatings Surf Coat Technol 86-87 302 308 10.1016/S0257-8972(96)03044-7 (Pubitemid 126405949)
4. Holmberg, K, Matthews, A, Coatings-Tribology: Properties, Techniques, and Applications in Surface Engineering. Elsevier, Amsterdam, 1994
5. Ebert, R., Schaldach, M. "Rutile Ceramics as Material for Cardiovascular Devices." Proc. World Congress on Medical Physics and Biomedical Engineering, pp. 307. Hamburg, 1982
6. H Nan Y-R Chen J-M Luo Y Jin L Rong X Jing Z-N Xue X-H Liu 1994 In Vitro Investigation of Blood Compatibility of Ti with Oxide Layers of Rutile Structure J. Biomater. Appl. 8 404 412 10.1177/088532829400800406
7. X Liu Z Zheng Z Zhou N Huang P Yang G Cai Y Chen 1996 Surface Modification of Titanium Based Biomaterials by Ion Beam J. Biomater. Appl. 10 330 337 1:CAS:528:DyaK28Xjt1WqsrY%3D
8. N Huang P Yang X Chen Y Leng X Zheng G Cai Z Zhen F Zhang Y Chen X Liu T Xi 1998 Blood Compatibility of Amorphous Titanium Oxide Films Synthesized by Ion Beam Enhanced Deposition Biomaterials 19 7-9 771 777 1:CAS:528: DyaK1cXjvVagsLw%3D
9. YX Leng P Yang JY Chen H Sun J Wang GJ Wang N Huang XB Tian PK Chu 2001 Fabrication of Ti-O/Ti-N Duplex Coatings on Biomedical Titanium Alloys by Metal Plasma Immersion Ion Implantation and Reactive Plasma Nitriding/oxidation Surf. Coat. Technol. 138 296 300 1:CAS:528:DC%2BD3MXisVOqsbs%3D 10.1016/S0257-8972(00) 01172-5 (Pubitemid 32235769)
10. MH Staia B Levis J Cawley T Hudson 1995 Chemical Vapour Deposition of TiN on Stainless Steel Surf. Coat. Technol. 76-77 231 236 10.1016/0257-8972(95) 02527-8
11. EJ Harju IM Penttinen AS Korhonen R Lappalainen 1990 Optimization of Wear and Corrosion Resistance of Triode-Ion-Plated Nitride Coatings Surf. Coat. Technol. 41 157 166 1:CAS:528:DyaK3cXitl2nuro%3D 10.1016/0257-8972(90)90164-8 (Pubitemid 20684827)
12. CC Chen A Erdemir GR Fenske 1989 Correlation of Interface Structure with Adhesive Strength of Ion-Plated TiN Hard Coatings Surf. Coat Technol. 39 40 365 376 10.1016/0257-8972(89)90069-8 (Pubitemid 20641163)
13. DE Peebles LE Pope 1989 Reactive Evaporation of Thin Titanium Nitride Films in Ultrahigh Vacuum and Their Friction and Wear Behavior as a Function of Contact Stress Thin Solid Films 173 19 37 1:CAS:528:DyaL1MXlvF2ht7c%3D 10.1016/0040-6090(89)90534-8 1989TSF...173...19P
14. C-T Kao S-J Ding Y-C Chen T-H Huang 2002 The Anticorrosion Ability of Titanium Nitride (TiN) Plating on an Orthodontic Metal Bracket and Its Biocompatibility J. Biomed. Mater. Res. (Appl. Biomater.) 63 786 792 1:CAS:528:DC%2BD38Xpt1eks7k%3D 10.1002/jbm.10484 (Pubitemid 35375427)
15. V Nelea H Pelletier D Muller N Broll P Mille C Ristoscu IN Mihailescu 2002 Mechanical Properties Improvement of Pulsed Laser-Deposited Hydroxyapatite Thin Films by High Energy Ion-Beam Implantation Appl. Surf. Sci. 186 483 489 1:CAS:528:DC%2BD38XitFartbs%3D 10.1016/S0169-4332(01)00754-1 2002ApSS..186..483N (Pubitemid 34231972)
16. P Ducheyne S Radin L King 1993 Effect Bioactive Ceramic Composition and Structure on In Vitro Behavior. I. Dissolution J. Biomed. Mater. Res. 27 25 34 1:CAS:528:DyaK3sXhsFCnurg%3D 10.1002/jbm.820270105 8380596 (Pubitemid 23002764)
17. WC Oliver GM Pharr 1992 An Improved Technique for Determining Hardness and Elastic Modulus Using Load and Displacement Sensing Indentation Experiments J Mater Res 7 6 1564 1583 1:CAS:528:DyaK38XktlWqtb4%3D 10.1557/JMR.1992.1564 1992JMatR...7.1564O
18. MI Jones IR McColl DM Grant 2000 Effect of Substrate Preparation and Deposition Conditions on the Preferred Orientation of TiN Coatings Deposited by RF Reactive Sputtering Surf Coat Technol 132 143 151 1:CAS:528: DC%2BD3cXmvFyksLY%3D 10.1016/S0257-8972(00)00867-7 (Pubitemid 32006568)
19. WJ Meng GL Eesley 1995 Growth and Mechanical Anisotropy of TiN Thin Films Thin Solid Films 271 1-2 108 116 1:CAS:528:DyaK28Xhsleqs7g%3D 10.1016/0040-6090(95)06875-9 1995TSF...271..108M
20. J Narayan P Tiwari X Chen J Singh R Chowdhury T Zheleva 1992 Epitaxial Growth of TiN Films on (100) Silicon Substrates by Laser Physical Vapor Deposition Appl. Phys. Lett. 61 1290 1293 1:CAS:528:DyaK38XmtVaisbc%3D 10.1063/1.107568 1992ApPhL..61.1290N
21. x Composite Coatings Vacuum 84 6 843 850 1:CAS:528:DC%2BC3cXht1ygsr8%3D 10.1016/j.vacuum.2009.11.010
22. TW Wu 1991 Microscratch and Load Relaxation Tests for Ultra-Thin Films J Mater Res 6 2 407 426 10.1557/JMR.1991.0407 1991JMatR...6..407W
23. Buckle, H, "Applications to Other Material Properties." In: Westbrook, JW, Conrad, H (eds.) The Science of Hardness Testing and Its Research Applications, pp. 453-491. ASM, Metals Park, OH, 1973
24. C Zhang Y Leng J Chen 2001 Elastic and Plastic Behavior of Plasma-Sprayed Hydroxyapatite Coatings on a Ti-6Al-4 V Substrate Biomaterials 22 11 1357 1363 1:CAS:528:DC%2BD3MXjtlequrY%3D 10.1016/S0142-9612(00)00289-1 11336308 (Pubitemid 32409957)
25. TG Nieh AF Jankowski J Koike 2001 Processing and Characterization of Hydroxyapatite Coatings on Titanium Produced by Magnetron Sputtering J. Mater. Res. 16 3238 3245 1:CAS:528:DC%2BD3MXotlaktL4%3D 10.1557/JMR.2001.0446 2001JMatR..16.3238N
26. B Jönsson S Hogmark 1984 Hardness Measurements of Thin Films Thin Solid Films 114 257 269 10.1016/0040-6090(84)90123-8 (Pubitemid 14588287)
27. PJ Burnett TF Page 1984 Surface Softening in Silicon by Ion Implantation J. Mater. Sci. 19 3 845 860 1:CAS:528:DyaL2cXhsV2htLs%3D 10.1007/BF00540455 1984JMatS..19..845B
28. AM Korunsky MR McGurk SJ Bull TF Page 1998 On the Hardness of Coated Systems Surf. Coat. Technol. 99 171 183 10.1016/S0257-8972(97)00522-7
29. Laval, P, "Etude théorique et expérimentale de l'indentation des matériaux élastoplastiques homogènes ou revêtus - Application à la mesure de la rhéologie et à l'adhérence des films minces." PhD thesis, Ecole Nationale Supérieure des Mines de Paris (1995)
30. V Jardret P Morel 2003 Viscoelastic Effects on the Scratch Resistance of Polymers: Relationship Between Mechanical Proprieties and Scratch Proprieties at Various Temperatures Prog. Org. Coat. 48 322 331 1:CAS:528:DC%2BD3sXpsVKrtL0%3D 10.1016/j.porgcoat.2003.02.002