XRD characterization of ion-implanted TiN coatings

Surface and Coatings Technology

Volumn 86-87, Issue PART 1, 1996, Pages 302-308

  Rafaja, D ^a   Valvoda, V ^a   Kuzel R ^a   Perry, A J ^b   Treglio, J R ^b  

^a CHARLES UNIVERSITY   (Czech Republic)

^b ISM Technologies Inc   (United States)

Author keywords

Interplanar spacing; Ion implanted TiN; XRD characterization

Indexed keywords

ANISOTROPY; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; DEFORMATION; ION IMPLANTATION; LATTICE CONSTANTS; MICROSTRUCTURE; RESIDUAL STRESSES; THIN FILMS; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

HARD COATINGS; INTERPLANAR SPACING; STRESS MEASUREMENT;

CERAMIC COATINGS;

EID: 0030401042     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03044-7     Document Type: Article

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