Visible luminescence from controlled multi-layer stack comprising of thin amorphous silicon and silicon nitride layers

IEEE International Conference on Group IV Photonics GFP

Volumn , Issue , 2007, Pages 88-90

  Tan, W K ^a   Yu, M B ^a   Chen, Q ^a   Ye, J D ^a   Lo, G Q ^a   Kwong, D L ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

LOW-THERMAL-BUDGET; MULTILAYER STACKS; VISIBLE LUMINESCENCE;

ELECTROLUMINESCENCE; LIGHT; PHOTONICS; SILICON NITRIDE;

AMORPHOUS SILICON;

EID: 78649836214     PISSN: 19492081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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