Light-emitting silicon nanocrystals and photonic structures in silicon nitride

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 12, Issue 6, 2006, Pages 1628-1635

  Dal Negro, Luca ^b   Yi, Jae Hyung ^c   Michel, Jurgen ^c   Kimerling, Lionel C ^a,c   Hamel, Sebastien ^d   Williamson, Andrew ^d   Galli, Giulia ^e  

^a IEEE   (United States)

^b Boston University   (United States)

^c Massachusetts Institute of Technology Cambridge   (United States)

^d LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Electroluminescence; Light sources; Nanotechnology; Silicon

Indexed keywords

OPTICAL MODES; ROOM TEMPERATURE; SILICON-RICH NITRIDE (SRN) FILMS;

ELECTROLUMINESCENCE; LIGHT EMITTING DIODES; LIGHT SOURCES; MAGNETRON SPUTTERING; NANOTECHNOLOGY; PHOTONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SILICON COMPOUNDS; SILICON NITRIDE;

NANOSTRUCTURED MATERIALS;

EID: 33845633820     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2006.883138     Document Type: Article

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