Development of B-C-N-O diaphragm for environmental cell transmission electron microscope by plasma enhanced chemical vapor deposition

AIP Conference Proceedings

Volumn 1282, Issue , 2010, Pages 39-43

  Tsutsui, Hidenori ^a   Matsutani, Takaomi ^a   Kawasaki, Tadahiro ^b  

^a KINKI UNIVERSITY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Boron carbon oxynitride film; Boron oxide film; Diaphragm for environmental cell; Plasma chemical vapor deposition; Transmission electron microscope

Indexed keywords

EID: 78649817063     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3508546     Document Type: Conference Paper

References (7)

1. M. Haruta, Journal of the Surface Science Society of Japan, 26, No. 10, 578 (2005) (in Japanese).
2. M. Haruta, Catalysis Today, 36, 153 (1997).
3. K. Ueda et al., Sufrace and Interface Analysis, 40, 1725 (2008).
4. Z. F. Zhou et al., Surface & Coatings Technology, 128-129, 334 (2000).
5. M.A Mannan et al., American Journal of Applied Science, 5, 736 (2007).
6. M.C. Polo, E. Martinez, J.Esteve, J.L. Andujar, Diamond and Related Materials, 7, 376 (1998).
7. Pi-Chuen Tsai, Surface & Coatings Technology, 201, 5108 (2007).