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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 27, Issue 3, 2009, Pages 1609-1614

Comparative study on structural and optical properties of ZnO films grown by metalorganic molecular beam deposition and metalorganic chemical vapor deposition

(6) Terasako, Tomoaki a Yura, Shinichiro a Azuma, Suguru a Shimomura, Satoshi a Shirakata, Sho a Yagi, Masakazu b

a EHIME UNIVERSITY (Japan)

b NATIONAL INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; CHEMICAL MODIFICATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR BEAMS; OPTICAL PROPERTIES; ORGANIC CHEMICALS; ORGANOMETALLICS; OXYGEN; OXYGEN VACANCIES; SUBSTRATES; WATER VAPOR; ZINC OXIDE;

BAND EMISSION; C-AXIS DIRECTION; COMPARATIVE STUDIES; ENERGY LEVEL; GLASS SUBSTRATES; GREEN-BAND EMISSION; INTERSTITIAL OXYGEN; LOW-PRESSURE METAL-ORGANIC CHEMICAL VAPOR DEPOSITIONS; LP-MOCVD; METAL ORGANIC; METALORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR BEAM DEPOSITION; NONRADIATIVE CENTERS; OXYGEN DEFICIENT; OXYGEN EXCESS; PHOTOACOUSTIC MEASUREMENTS; PHOTOLUMINESCENCE SPECTRUM; POLYCRYSTALLINE ZINC OXIDES; PREFERENTIAL GROWTH; STRUCTURAL AND OPTICAL PROPERTIES; SUBSTRATE TEMPERATURE; ZNO FILMS;

OXIDE FILMS;

EID: 78649744236 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3130155 Document Type: Conference Paper

Times cited : (3)

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