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Volumn 42, Issue 12-13, 2010, Pages 1702-1705

Surface studies of diamond-like carbon films grown by plasma-enhanced chemical vapor deposition

(6) Maheswaran, R a Sivaraman, R a Mahapatra, O a Rao, P C a Gopalakrishnan, C a Thiruvadigal, D J a

a SRM INSTITUTE OF SCIENCE AND TECHNOLOGY (India)

Author keywords

amorphous carbon; argon; atomic force microscopy; diamond like carbon; methane; plasma enhanced chemical vapour deposition; plasma pressure; Raman spectra; surface roughness; thin films

Indexed keywords

ARGON PRESSURE; DIAMOND-LIKE CARBON; DLC FILM; FILM SURFACES; GRAIN SIZE; PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION; PLASMA PRESSURE; PLASMA PRESSURES; PLASMA-ENHANCED CHEMICAL VAPOUR DEPOSITIONS; RAMAN SPECTRA; RAMAN SPECTRUM; SURFACE STUDY; UNIFORM DISTRIBUTION;

AMORPHOUS CARBON; AMORPHOUS FILMS; ARGON; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; ATOMS; CARBON FILMS; DEPOSITION; DIAMONDS; HIGH PRESSURE EFFECTS IN SOLIDS; METAL ANALYSIS; METHANE; MORPHOLOGY; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SURFACE MORPHOLOGY; SURFACE PROPERTIES; SURFACE ROUGHNESS; SYNTHETIC DIAMONDS; THIN FILMS;

DIAMOND LIKE CARBON FILMS;

EID: 78649540971 PISSN: 01422421 EISSN: 10969918 Source Type: Journal
DOI: 10.1002/sia.3371 Document Type: Article

Times cited : (9)

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