Growth of hydrogen-free diamond-like carbon films by a particle-free hollow-cathode arc ion plating system

Thin Solid Films

Volumn 498, Issue 1-2, 2006, Pages 206-211

  Cheng, Chiao Yang ^a   Hong, Franklin Chau Nan ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Diamond like carbon films; Hollow cathode arc ion plating system; Hydrogen free; Particle free

Indexed keywords

ELECTRIC ARCS; ELECTROPLATING; GROWTH (MATERIALS); HYDROGEN; IONS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

HOLLOW CATHODE ARC ION PLATING SYSTEM; HYDROGEN-FREE; PARTICLE-FREE;

DIAMOND LIKE CARBON FILMS;

EID: 30944462171     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.089     Document Type: Conference Paper

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