Diagnostics of N2 dissociation in RF plasmas by vacuum ultraviolet emission and absorption spectroscopy

Plasma Sources Science and Technology

Volumn 17, Issue 2, 2008, Pages

  Kitajima, Takeshi ^a   Nakano, Toshiki ^a   Samukawa, Seiji ^b   Makabe, Toshiaki ^c  

^a NATIONAL DEFENSE ACADEMY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; DISSOCIATION; METASTABLE PHASES; OPTICAL EMISSION SPECTROSCOPY;

DISSOCIATION DEGREE; VACUUM ULTRAVIOLET EMISSION; VACUUM ULTRAVIOLET OPTICAL EMISSION SPECTROSCOPY (VUVOES);

INDUCTIVELY COUPLED PLASMA;

EID: 43149096682     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/2/024018     Document Type: Article

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