Comparison of the fluorine atom density measured by actinometry and vacuum ultraviolet absorption spectroscopy

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 9 A/B, 1997, Pages

  Kawai, Yozo ^a   Sasaki, Koichi ^a   Kadota, Kiyoshi ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Actinometry; C4F8; CF4; Fluorine atom density; Helicon plasma; Vacuum ultraviolet absorption spectroscopy

Indexed keywords

ABSORPTION SPECTROSCOPY; ATOMS; HELICONS; PLASMA DENSITY; ULTRAVIOLET SPECTROSCOPY; VACUUM APPLICATIONS;

ACTINOMETRY; FLUORINE ATOM DENSITY; HELICON WAVE DISCHARGES;

FLUOROCARBONS;

EID: 0031223801     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l1261     Document Type: Review

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