Experimental study on the effect of different noble gas admixtures on the gas temperature of oxygen plasma

Journal of Advanced Oxidation Technologies

Volumn 8, Issue 1, 2005, Pages 25-32

  Naoi, K ^a   Sakamoto, T ^a   Matsuura, H ^a   Akatsuka, H ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Microwave discharge; Oxygen plasma; Rotational temperature; Spectroscopic measurement

Indexed keywords

ELECTRIC DISCHARGES; FREE RADICALS; INERT GASES; MICROWAVE TUBES; OPTICAL EMISSION SPECTROSCOPY; OXYGEN; QUANTUM THEORY;

MICROWAVE DISCHARGE; OPTICAL EMISSION SPECTROSCOPIES (OES); OXYGEN PLASMAS; RADIATIVE TRANSITIONS; ROTATIONAL TEMPERATURE; SPECTROSCOPIC MEASUREMENTS; VIBRATIONAL QUANTUM NUMBER; VIBRATIONAL TEMPERATURE;

PLASMA DIAGNOSTICS;

EID: 12444336869     PISSN: 12038407     EISSN: None     Source Type: Journal    
DOI: 10.1515/jaots-2005-0104     Document Type: Conference Paper

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