Microfabrication of millimeter wave vacuum electron devices by two-step deep-etch x-ray lithography

Applied Physics Letters

Volumn 88, Issue 9, 2006, Pages

  Shin, Young Min ^a   So, Jin Kyu ^a   Han, Seong Tae ^a   Jang, Kyu Ha ^a   Park, Gun Sik ^a   Kim, Jong Hyun ^b   Chang, Suk Sang ^b  

^a Seoul National University   (South Korea)

^b POSTECH   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ELECTRON DEVICES; LITHOGRAPHY; SURFACE ROUGHNESS; WAVEGUIDES;

ELECTRON BEAM TUNNELS; LIGA-FABRICATED CIRCUITS;

VACUUM APPLICATIONS;

EID: 33644695092     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2178770     Document Type: Article

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