Experimental investigations on miniaturized high-frequency vacuum electron devices

IEEE Transactions on Plasma Science

Volumn 33, Issue 2 II, 2005, Pages 679-684

  Han, Seong Tae ^a   Jeon, Seok Gy ^a   Shin, Young Min ^a   Jang, Kyu Ha ^a   So, Jin Kyu ^a   Kim, Jong Hyun ^b   Chang, Suk Sang ^b   Park, Gun Sik ^a  

^a Seoul National University   (South Korea)

^b POSTECH   (South Korea)

Author keywords

Abformung (LIGA); Debye length; Deep etch X ray lithography: Lithographie; Galvanoformung; Photonic crystal (PC) resonator; Terahertz

Indexed keywords

CRYSTAL RESONATORS; KLYSTRONS; TRAVELING WAVE TUBES; VACUUM TECHNOLOGY; X RAY LITHOGRAPHY;

DEBYE LENGTH; DEEP ETCH X RAY LITHOGRAPHY; PHOTONIC CRYSTAL RESONATOR; VACUUM ELECTRON DEVICES;

ELECTRON DEVICES;

EID: 18844408357     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.844529     Document Type: Article

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