Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2006, Pages 1463-1466

  Yanagitani, Takahiko ^a   Kiuchi, Masato ^a   Matsukawa, Mami ^b   Watanabe, Yoshiaki ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b DOSHISHA UNIVERSITY   (Japan)

Author keywords

(11 20) textured ZnO film; Pure shear mode film bulk acoustic resonator; RF magnetron sputtering; Shear mode electromechanical coupling coefficient k15

Indexed keywords

ELECTROMECHANICAL COUPLING COEFFICIENTS; RF-MAGNETRON SPUTTERING; SHEAR MODES; SUBSTRATE PLANES; ZNO FILMS;

ACOUSTIC RESONATORS; ALIGNMENT; CRYSTALLITES; ELECTROMECHANICAL COUPLING; MAGNETRON SPUTTERING; METALLIC FILMS; RESONATORS; ZINC OXIDE;

ELECTROMECHANICAL DEVICES;

EID: 78649358930     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2006.368     Document Type: Conference Paper

References (10)

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