Conversion characteristics of the shear wave transducer made of unidirectionally aligned ZnO film in plane

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 5 A, 2006, Pages 4201-4203

  Nohara, Takuya ^a   Yanagitani, Takahiko ^a   Matsukawa, Mami ^a   Watanabe, Yoshiaki ^a  

^a DOSHISHA UNIVERSITY   (Japan)

Author keywords

BAW device; Conversion loss; Pole figure analysis; RF magnetron sputtering; Rocking curve; Shear wave transducer; ZnO film

Indexed keywords

DEPOSITION; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; SHEAR WAVES; SUBSTRATES; THIN FILMS; TRANSDUCERS; X RAY DIFFRACTION;

BAW DEVICE; CONVERSION LOSS; POLE FIGURE ANALYSIS; RF MAGNETRON SPUTTERING; ROCKING CURVE; SHEAR WAVE TRANSDUCER; ZNO FILM;

ZINC OXIDE;

EID: 33646887019     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.4201     Document Type: Article

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