Simulation of reactive sputter deposition of TiO2 films

Medziagotyra

Volumn 16, Issue 3, 2010, Pages 202-204

  Knizikevičius, Rimantas ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Hysteresis; Reactive sputter deposition; TiO2

Indexed keywords

EID: 78649355549     PISSN: 13921320     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

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