Design and simulation of touch mode MEMS capacitive pressure sensor

ICMET 2010 - 2010 International Conference on Mechanical and Electrical Technology, Proceedings

Volumn , Issue , 2010, Pages 180-183

  Sathyanarayanan, S ^a   Juliet, A Vimala ^a  

^a SRM INSTITUTE OF SCIENCE AND TECHNOLOGY   (India)

Author keywords

Capacitive pressure sensor; MEMS; PolySi; Sensor

Indexed keywords

APPLIED PRESSURE; BIOMEDICAL APPLICATIONS; CAPACITANCE CHANGE; CAPACITIVE PRESSURE SENSORS; CAPACITIVE SENSING; DESIGN AND SIMULATION; FABRICATING PROCESS; MICROELECTROMECHANICAL SYSTEMS; OPERATING PRESSURE; POLYSI; SENSOR SENSITIVITY; SILICON SUBSTRATES; TOUCH MODE;

CAPACITANCE; DESIGN; DIAPHRAGMS; PARTIAL PRESSURE SENSORS; POLYSILICON; PRESSURE SENSORS;

MEMS;

EID: 78649308942     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMET.2010.5598346     Document Type: Conference Paper

References (16)

1. Guangqiang Jiang," Design challenges of implantable pressure monitoring system," Frontiers in Neuroscience 39 (2010) vol.4, Article 29.
2. Ching-Liang Daia, Pin-Hsu Kaoa, Yao-Wei Taia, Chyan-Chyi Wub," Micro FET pressure sensor manufactured using CMOS-MEMS technique," Microelectronics Journal 39 (2008) pp.744-749.
3. Sathyanarayanan.S, Dr.A. Vimala Juliet, "Design of wireless pressure sensor for monitoring intraocular pressure" Proceeding of 2nd ISSS national Conference on MEMS, Microsensors, Smart materials, Structures and Systems", 2007, C36, pp. 28-29.
4. Th. G. S. M. Rijks, et al., "Microelectromechanical tunable capacitors for reconfigurable RF architectures," Journal of Micromechanics and Microengineering 16 (3), pp. 601-611, February 2006.
5. K.I. Arshak, D. Morris, A. Arshak, O. Korostynska, and E. Jafer, "Development of a wireless pressure measurement system using interdigitated capacitors," IEEE Sensors Journal, vol. 7, no. 1, January 2007.
6. Schnakenberg., C Kruger, J.G. Pfeffer, W. Mokwa, G.V. Bogel, R. Gunther, T.S. Rode, Intravascular pressure monitoring system, Sens. Actuators A 110 (2004) 61-67.
7. S-P. Chang and M.G. Allen, "Capacitive pressure sensors with stainless steel diaphragm and substrate " Journal of Micromechanics and Microengineering 14 (4), pp. 612-618, 2004.
8. S-P. Chang, and M.G. Allen, "Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate, Sensors and Actuators, A. Physical , 116 (2), pp. 195-204, 2004.
9. Q. Huang and Michael Oberle, "A 0.5mW Passive Telemetry IC for Biomedical Applications," IEEE Journal of Solid-State Circuits, Vol. 33, No. 7, July 1998.
10. Akar, T. Akin, and K. Najafi, "A Wireless Batch Sealed Absolute Capacitive Pressure Sensor," Journal of Sensors and Actuators, pp. 29-38, 2001.
11. S. Chatzandroulis. D. Tsoukalas, and P.A. Neukomm, "A Miniature Pressure System with a Capacitive Sensor and a Passive Telemetry Link for Use in Implantable Applications," IEEE Journal of MEMS, Vol. 9, No. 1, March 2000.
12. B. Mezghani, S. Smaoui, M. Masmoudi, and C. Dufaza, "MEMS inductor in LC receivers for the RF link of cochlear implants," The 13th International C. on Microelectronics, Rabat, Morocco, Oct.2001.
13. L.Q. Du, G. Kwon, F. Arai, T. Fukuda, K. Itoigawa, Y. Tukahara, Sens. Actuator A 107 (2003) 7-13.
14. E. Defay, C. Millon, C. Malhaire, D. Barbier, Sens. Actuator A 99 (2002) 64-67.
15. P.-J. Chen, D. C. Rodger, M. S. Humayun, and Y.-C. Tai, "Unpowered Spiral-Tube Parylene Pressure Sensor for Intraocular Pressure Sensing," Sensors and Actuators A:Physical, vol. 127, 2006, pp. 276-282.
16. Sathyanarayanan.S, Dr. A. Vimala Juliet, "Design and Simulation of wireless passive pressure sensor for monitoring intraocular pressure" Proceeding of International Conference on Resource Utilization and Intelligent Systems",2008, pp. 708-710.