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Journal of Micromechanics and Microengineering

Volumn 14, Issue 4, 2004, Pages 612-618

Capacitive pressure sensors with stainless steel diaphragm and substrate

(2) Chang, Sung Pil a,b Allen, Mark G a

a GEORGIA INSTITUTE OF TECHNOLOGY (United States)

b Samsung Electro Mechanics (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COST ACCOUNTING; ELECTRODEPOSITION; ELECTROPLATING; LAMINATING; NICKEL PLATING; PRESSURE TRANSDUCERS; SENSITIVITY ANALYSIS; STAINLESS STEEL; VOLTAGE MEASUREMENT;

PARASITIC EFFECTS; PRESSURE SENSORS; ROBUST MATERIAL; SUSPENDED PLATE;

MICROSENSORS;

EID: 2342630610 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/14/4/023 Document Type: Article

Times cited : (41)

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