Strain relaxation mechanisms in AlGaN epitaxy on AlN templates

Applied Physics Express

Volumn 3, Issue 11, 2010, Pages

  Wu, Zhihao ^a   Nonaka, Kentaro ^b   Kawai, Yohjiro ^c   Asai, Toshiaki ^b   Ponce, Fernando A ^d   Chen, Changqing ^a   Iwaya, Motoaki ^b   Kamiyama, Satoshi ^b   Amano, Hiroshi ^c   Akasaki, Isamu ^b  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b MEIJO UNIVERSITY   (Japan)

^c NAGOYA UNIVERSITY   (Japan)

^d ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGAN; ALGAN FILMS; ALN; BURGER VECTORS; DISLOCATION LINES; IN-PROCESS; INTERFACIAL MISFIT DISLOCATIONS; STRAIN RELAXATION MECHANISM; THREADING DISLOCATION; UNDERLAYERS;

EPITAXIAL GROWTH; STRAIN CONTROL; STRAIN RELAXATION;

BURGERS VECTOR;

EID: 78549242628     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.3.111003     Document Type: Article

References (11)

1. H. Amano et al.: Phys. Status Solidi A 195 (2003) 491.
2. A. Khan et al.: Nat. Photonics 2 (2008) 77.
3. P. Cantu et al.: Appl. Phys. Lett. 83 (2003) 674.
4. D. M. Follstaedt et al.: Appl. Phys. Lett. 87 (2005) 121112.
5. P. Cantu et al.: J. Appl. Phys. 97 (2005) 103534.
6. D. M. Follstaedt et al.: J. Appl. Phys. 105 (2009) 083507.
7. M. Imura et al.: Jpn. J. Appl. Phys. 46 (2007) 1458.
8. B. Fultz and J. M. Howe: Transmission Electron Microscopy and Diffractometry of Materials (Springer, New York, 2002) 2nd ed., p. 643.
9. S. Srinivasan et al.: Appl. Phys. Lett. 83 (2003) 5187.
10. T. Asai et al.: J. Cryst. Growth 311 (2009) 2850.
11. J. W. Matthews et al.: J. Appl. Phys. 41 (1970) 3800.