Chemically sensitized thin-film bulk acoustic wave resonators as humidity sensors

Journal of the Electrochemical Society

Volumn 157, Issue 12, 2010, Pages

  Ashley, G M ^a   Kirby, P B ^b   Butler, T P ^c   Whatmore, R ^d   Luo, J K ^a  

^a UNIVERSITY OF BOLTON   (United Kingdom)

^b CRANFIELD UNIVERSITY   (United Kingdom)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^d UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

CONTINUOUS TRACKING; FREQUENCY CHANGES; GIGAHERTZ FREQUENCIES; HUMIDITY CHANGE; HYGROSCOPIC POLYMERS; MICROFABRICATED; MOISTURE CONTENTS; PROTOTYPE SENSOR; Q-FACTORS; RESPONSE TIME; THIN-FILM BULK ACOUSTIC WAVE RESONATOR; TRANSMISSION LINE; VINYL PYRROLIDONE;

ACOUSTIC RESONATORS; ACOUSTIC WAVES; ACOUSTICS; ATMOSPHERIC HUMIDITY; FREQUENCY RESPONSE; HUMIDITY SENSORS; POLYMER FILMS; RESONATORS;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 78449285295     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3496003     Document Type: Article

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