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Electrochemical and Solid-State Letters

Volumn 13, Issue 5, 2010, Pages

Film bulk acoustic-wave resonator based relative humidity sensor using ZnO films

(7) Qiu, Xiaotun a Oiler, Jon b Zhu, Jie a Wang, Ziyu b Tang, Rui a Yu, Cunjiang a Yu, Hongyu a,b

a Arizona State University (United States)

b ARIZONA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORBED OXYGEN; FILM BULK ACOUSTIC-WAVE RESONATORS; FREQUENCY DOWNSHIFT; MASS LOADING EFFECTS; RELATIVE HUMIDITIES; RELATIVE HUMIDITY SENSORS; RESONANT FREQUENCIES; TWO STAGE; WATER LAYERS; WATER MOLECULE; ZNO; ZNO FILMS; ZNO SURFACE;

ACOUSTIC EQUIPMENT; ACOUSTIC SURFACE WAVE FILTERS; MOISTURE; NATURAL FREQUENCIES; OXYGEN; RESONATORS; ZINC OXIDE;

ATMOSPHERIC HUMIDITY;

EID: 77949716946 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.3332397 Document Type: Article

Times cited : (20)

References (12)

1
- 0030232663
- 0925-4005, 10.1016/S0925-4005(97)80037-8
- R. Anchisini, G. Faglia, M. C. Gallazzi, G. Sberveglieri, and G. Zerbi, Sens. Actuators B 0925-4005, 35, 99 (1996). 10.1016/S0925-4005(97)80037-8
- (1996) Sens. Actuators B , vol.35 , pp. 99
- Anchisini, R.¹ Faglia, G.² Gallazzi, M.C.³ Sberveglieri, G.⁴ Zerbi, G.⁵

2
- 2542480271
- 0925-4005, 10.1016/j.snb.2004.02.050
- P. M. Faia, C. S. Furtado, and A. J. Ferreira, Sens. Actuators B 0925-4005, 101, 183 (2004). 10.1016/j.snb.2004.02.050
- (2004) Sens. Actuators B , vol.101 , pp. 183
- Faia, P.M.¹ Furtado, C.S.² Ferreira, A.J.³

3
- 0034247725
- 0925-4005, 10.1016/S0925-4005(00)00448-2
- M. Penza and G. Cassano, Sens. Actuators B 0925-4005, 68, 300 (2000). 10.1016/S0925-4005(00)00448-2
- (2000) Sens. Actuators B , vol.68 , pp. 300
- Penza, M.¹ Cassano, G.²

4
- 54949128695
- 0021-4922, 10.1143/JJAP.47.4007
- M. Ueda, M. Hara, S. Taniguchi, T. Yokoyama, T. Nishihara, K. Hashimoto, and Y. Satoh, Jpn. J. Appl. Phys. 0021-4922, 47, 4007 (2008). 10.1143/JJAP.47.4007
- (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 4007
- Ueda, M.¹ Hara, M.² Taniguchi, S.³ Yokoyama, T.⁴ Nishihara, T.⁵ Hashimoto, K.⁶ Satoh, Y.⁷

5
- 24644488706
- 1057-7157, 10.1109/JMEMS.2005.845405
- H. Zhang and E. S. Kim, J. Microelectromech. Syst. 1057-7157, 14, 699 (2005). 10.1109/JMEMS.2005.845405
- (2005) J. Microelectromech. Syst. , vol.14 , pp. 699
- Zhang, H.¹ Kim, E.S.²

6
- 58349112177
- 0003-6951, 10.1063/1.3073042
- Y. Li, F. Valle, M. Simonnet, I. Yamada, and J. Delaunay, Appl. Phys. Lett. 0003-6951, 94, 023110 (2009). 10.1063/1.3073042
- (2009) Appl. Phys. Lett. , vol.94 , pp. 023110
- Li, Y.¹ Valle, F.² Simonnet, M.³ Yamada, I.⁴ Delaunay, J.⁵

7
- 65249164036
- 0003-6951, 10.1063/1.3122342
- X. Qiu, J. Zhu, J. Oiler, C. Yu, Z. Wang, and H. Yu, Appl. Phys. Lett. 0003-6951, 94, 151917 (2009). 10.1063/1.3122342
- (2009) Appl. Phys. Lett. , vol.94 , pp. 151917
- Qiu, X.¹ Zhu, J.² Oiler, J.³ Yu, C.⁴ Wang, Z.⁵ Yu, H.⁶

8
- 0035869025
- 1089-5647, 10.1021/jp002525j
- R. Sun, A. Nakajima, A. Fujishima, T. Watanabe, and K. Hashimoto, J. Phys. Chem. B 1089-5647, 105, 1984 (2001). 10.1021/jp002525j
- (2001) J. Phys. Chem. B , vol.105 , pp. 1984
- Sun, R.¹ Nakajima, A.² Fujishima, A.³ Watanabe, T.⁴ Hashimoto, K.⁵

9
- 0347760121
- 0002-7863, 10.1021/ja038636o
- X. J. Feng, L. Feng, M. H. Jin, J. Zhai, L. Jiang, and D. B. Zhu, J. Am. Chem. Soc. 0002-7863, 126, 62 (2004). 10.1021/ja038636o
- (2004) J. Am. Chem. Soc. , vol.126 , pp. 62
- Feng, X.J.¹ Feng, L.² Jin, M.H.³ Zhai, J.⁴ Jiang, L.⁵ Zhu, D.B.⁶

10
- 3142769770
- 0743-7463, 10.1021/la036280o
- H. Liu, L. Feng, J. Zhai, L. Jiang, and D. B. Zhu, Langmuir 0743-7463, 20, 5659 (2004). 10.1021/la036280o
- (2004) Langmuir , vol.20 , pp. 5659
- Liu, H.¹ Feng, L.² Zhai, J.³ Jiang, L.⁴ Zhu, D.B.⁵

11
- 61849176000
- 0361-5235, 10.1007/s11664-008-0615-0
- J. Han and W. Gao, J. Electron. Mater. 0361-5235, 38, 601 (2009). 10.1007/s11664-008-0615-0
- (2009) J. Electron. Mater. , vol.38 , pp. 601
- Han, J.¹ Gao, W.²

12
- 22944457837
- 1089-5647, 10.1021/jp051499s
- M. Miyauchi, A. Shimai, and Y. Tsuru, J. Phys. Chem. B 1089-5647, 109, 13307 (2005). 10.1021/jp051499s
- (2005) J. Phys. Chem. B , vol.109 , pp. 13307
- Miyauchi, M.¹ Shimai, A.² Tsuru, Y.³

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