Fixed charge density in silicon nitride films on crystalline silicon surfaces under illumination

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2002, Pages 162-165

  Dauwe, Stefan ^a   Schmidt, Jan ^a   Metz, Axel ^a   Hezel, Rudolf ^a  

^a INSTITUTE FOR SOLAR ENERGY RESEARCH HAMELIN ISFH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ELECTRIC SPACE CHARGE; INTERFACES (MATERIALS); PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON SOLAR CELLS; SILICON WAFERS;

CORONA CHARGING; FIXED POSITIVE CHARGE DENSITY; KELVIN PROBE; SURFACE RECOMBINATION VELOCITY;

SILICON NITRIDE;

EID: 0036953415     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2002.1190481     Document Type: Conference Paper

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