Analysis and fabrication of corner cube array based on laser direct writing technology

Applied Optics

Volumn 49, Issue 29, 2010, Pages 5567-5574

  Lou, Yimin ^a,b,d   Wang, Hui ^b,d   Liu, Qingkun ^c,d   Shi, Yaocheng ^c,d   He, Sailing ^c,d  

^a SOOCHOW UNIVERSITY   (China)

^b ZHEJIANG NORMAL UNIVERSITY   (China)

^c ZHEJIANG UNIVERSITY   (China)

^d ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; OPTICAL WAVEGUIDES;

CORNER CUBE ARRAY; INCIDENT ANGLES; LASER DIRECT WRITING; LONG-RANGE PROPAGATION; RETROREFLECTANCE; SHAPE MEASUREMENTS;

RAY TRACING;

EID: 78349238968     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.49.005567     Document Type: Article

References (30)

1. K. S. J. Pister, D. S. Gunawan, and L. Lin, "Micromachined corner cube reflectors as a communication link," Sens. Actuators A Phys. 47, 580-583 (1995).
2. K. Hyyppa, "Signal response of a laser beam scanner," Opt. Eng. 33, 2770-2776 (1994).
3. O. Nakamara, M. Goto, K. Toyoda, N. Takai, T. Kurosawa, and T. Nakamata, "A laser tracking robot-performance calibration system using ball-seated bearing mechanisms and a spherically shaped cat's eye retroreflector," Rev. Sci. Instrum. 65, 1006-1011 (1994).
4. B. E. Hines, "Optical truss and retroreflector modeling for picometer laser metrology," Proc. SPIE 1947, 198-208 (1993).
5. R. A. Chipman, J. Shamir, H. J. Caulfield, and Q. Zhou, "Wavefront correcting properties of corner-cube arrays," Appl. Opt. 27, 3203-3209 (1988).
6. J. Fergason, "Optical system for head mounted display using retroreflector and method of displaying an image," U.S. patent 5,621,572 (15 April 1997).
7. R. Kijima and T. Ojika, "Transition between virtual environment and workstation environment with projective head-mounted display," in IEEE 1997 Virtual Reality Annual International Symposium (IEEE, 1997), pp. 130-137.
8. M. Inami, N. Kawakami, D. Sekiguchi, Y. Yanagida, T. Maeda, and S. Tachi, "Visuo-haptic display using head-mounted projector," in IEEE 2000 Virtual Reality Annual International Symposium (IEEE, 2000), pp. 233-240.
9. H. Hua, C. Gao, F. Biocca, and J. P. Rolland, "An ultra-light and compact design and implementation of head-mounted projective displays," in IEEE 2000 Virtual Reality Annual International Symposium (IEEE, 2001), pp. 175-182.
10. H. Hua, L. Brown, and C. Gao, "SCAPE: supporting stereoscopic collaboration in augmented and projective environments," IEEE Comput. Graphics Appl. 24, 66-75 (2004).
11. ASTM International, "Standard specification for retroreflective sheeting for traffic control," Tech. Rep. ASTM D 4956-0 (2001).
12. 3M Traffic Control Materials Division, "Product catalog for traffic control materials," (2003), http://www.3M.com/tcm.
13. T. L. Hoopman, "Cube-corner retroreflective articles having wide angularity in multiple viewing planes," U.S. patent 4,588,258 (13 May 1986).
14. D.C.O'Brien,G.E.Faulkner,andD.J.Edwards, "Opticalproperties of a retroreflecting sheet," Appl. Opt. 38, 4137-4144 (1999).
15. H. D. Eckhardt, "Simple model of corner reflector phenomena," Appl. Opt. 10, 1559-1566 (1971).
16. X. Zhu, V. S. Hsu, and J. M. Kahn, "Optical modeling of MEMS corner cube retroreflectors with misalignment and nonflatness," IEEE J. Sel. Top. Quantum Electron. 8, 26-32 (2002).
17. W. H. Venable Jr. and N. L. Johnson, "Unified coordinate system for retroreflectance measurements," Appl. Opt. 19, 1236-1241 (1980).
18. J. J. Rennilson, "Retroreflection measurements: a review," Appl. Opt. 19, 1234-1235 (1980).
19. G. H. Seward and P. S. Cort, "Measurement and characterization of angular reflectance for cube-corners and microspheres," Opt. Eng. 38, 164-169 (1999).
20. J. Yuan, S. Chang, S. Li, and Y. Zhang, "Design and fabrication of micro-cube-corner array retroreflectors," Opt. Commun. 209, 75-83 (2002).
21. H. Kim and B. Lee, "Optimal design of retroreflection corner cube sheets by geometric optics analysis," Opt. Eng. 46, 094002 (2007).
22. H. Kim, S.-W. Min, and B. Lee, "Geometrical optics analysis of the structural imperfection of retroreflection corner cubes with a nonlinear conjugate gradient method," Appl. Opt. 47, 6453-6469 (2008).
23. E. Brinksmeier, R. Gläbe, and C. Flucke, "Manufacturing of molds for replication of micro cube corner retroreflectors," Prod. Eng. Res. Devel. 2, 33-38 (2008).
24. K. Reimer, R. Engelke, U. Hofmann, P. Merz, K. T. Kohlmann-von Platen, and B. Wagner, "Progress in gray-tone lithography and replication techniques for different materials," Proc. SPIE 3879, 98-108 (1999).
25. H. Hockel, R. Martins, J. Sung, and E. G. Johnson, "Design and fabrication of trihedral corner-cube arrays using analog exposure based on phase masks," Proc. SPIE 5720, 78-85 (2005).
26. K. I. Jolic, M. K. Ghantasala, and E. C. Harvey, "Excimer laser machining of corner cube structures," J. Micromech. Microeng. 14, 388-397 (2004).
27. P. K.Weng and J. Shie, "A revolving retroreflective marker for an optical tachometer," Sens. Actuators A Phys. 24, 203-207 (1990).
28. G. W. Neudeck, J. Spitz, J. C. H. Chang, J. P. Denton, and N. Gallagher, "Precision crystal corner cube arrays for optical gratings formed by (100) silicon planes with selective epitaxial growth," Appl. Opt. 35, 3466-3470 (1996).
29. M. T. Gale, M. Rossi, J. Pedersen, and H. Schulz, "Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists," Opt. Eng. 33, 3556-3566 (1994).
30. K. Zimmer, D. Hirsch, and F. Big, "Excimer laser machining for the fabrication of analogous microstructures," Appl. Surf. Sci. 96-98, 425-429 (1996).