Excimer laser machining of corner cube structures

Journal of Micromechanics and Microengineering

Volumn 14, Issue 3, 2004, Pages 388-397

  Jolic, K I ^a   Ghantasala, M K ^a   Harvey, E C ^a  

^a SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CORNER CUBE STRUCTURES; PROJECTION APERTURE;

COMPUTER SIMULATION; ETCHING; HEAT TREATMENT; LASER PULSES; MACHINING; OPTICAL MICROSCOPY; POLISHING; POLYCARBONATES; RAY TRACING; SURFACE ROUGHNESS;

EXCIMER LASERS;

EID: 1842587625     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/3/011     Document Type: Article

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