Progress in Graytone lithography and replication techniques for different materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3879, Issue , 1999, Pages 98-105

  Reimer, K ^a   Engelke, R ^a   Hofmann, U ^a   Merz, P ^a   Kohlmann v Platen, K T ^a   Wagner, B ^a  

^a FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICS; ELECTRIC FIELDS; INJECTION MOLDING; MICROOPTICS; MICROSTRUCTURE; OPTICAL INSTRUMENT LENSES; SURFACE PROPERTIES; SURFACE TOPOGRAPHY; THREE DIMENSIONAL;

GRAYTONE LITHOGRAPHY; INFRARED LENSES; MICROFABRICATION; MICROOPTICAL ELEMENTS;

LITHOGRAPHY;

EID: 0033342863     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)