Acoustically generated micromachined jet arrays for micropropulsion applications

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn , Issue , 2002, Pages 439-448

  Müller, Michael O ^a   Bernal, Luis P ^a   Washabaugh, Peter D ^a   Chou, Tsung Kuan A ^b   Kim, Hanseup S ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; MECHANICAL ENGINEERING;

ACCURATE PERFORMANCE; GEOMETRIC SIZES; JET ARRAYS; MANUFACTURING METHODS; MEMS TECHNOLOGY; MEMSDEVICES; MICROMACHINED; MICROPROPULSION APPLICATIONS; PERFORMANCE BENEFITS; REDUCED ORDER; SOUND DESIGNS;

MANUFACTURE;

EID: 78249245731     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2002-33630     Document Type: Conference Paper

References (9)

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2. COE, D.J., ALLEN, M.G., SMITH, B. L. AND GLEZER, A. 1995 Addressable micromachined jet arrays. Transducers 1995.
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