Analysis of three-dimensional single stage and two-dimensional multistage models of flows in turbomolecular pumps

Vacuum

Volumn 48, Issue 5, 1997, Pages 449-453

  Schneider, T N ^a   Katsimichas, S ^a   De Oliveira, C R E ^a   Goddard, A J H ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED ANALYSIS; COMPUTER SIMULATION; MONTE CARLO METHODS; THREE DIMENSIONAL COMPUTER GRAPHICS;

TURBOMOLECULAR VACUUM PUMPS (TMP);

VACUUM PUMPS;

EID: 0031143188     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(96)00310-7     Document Type: Article

References (7)

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3. S. Katsimichas, A.J.H. Goddard, R. Lewington, C.R.E. de Oliveira, Calculation of transmission probabilities for a general turbomolecular pump blade passage, The Pittsburgh Conference, Paper Number: 539P, Chicago, Illinois, USA, March (1996).
4. Tu, J.Y. and Yang, N.H., Vacuum, 1987, 37, 831.
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6. de Simon, M., Vacuum, 1990, 41, 2021.
7. Casaro, F. and Levi, G., J. Vac. Sci. Tech., 1991, A 9, 2058.